Open AccessP2.1 - Pattern Definition of Foil Based Sensors with Ultrafast UV Lasers
Author(s) -
Matthäus Langosch,
M. Cerino,
Angela Lellig,
Dennis Vollberg,
Anne-Catherine Probst,
Olivia Freitag-Weber,
G. Schultes,
Alexander Landes,
Dirk Göttel
Publication year - 2015
Publication title -
proceedings sensor 2015
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2015/p2.1
Subject(s) - foil method , ultrashort pulse , laser , optoelectronics , materials science , optics , computer science , physics , composite material