Open AccessC8.1 - Modelling and Control of a Pressure and Temperature Test Chamber for Pure Mems Pressure Sensors
Author(s) -
J. Lotichius,
Eike Christmann,
Roland Werthschützky
Publication year - 2015
Publication title -
proceedings sensor 2011
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2015/c8.1
Subject(s) - temperature control , thermoelectric effect , temperature measurement , thermoelectric cooling , airflow , controller (irrigation) , microelectromechanical systems , volume (thermodynamics) , control theory (sociology) , mechanical engineering , materials science , steady state (chemistry) , pid controller , nuclear engineering , engineering , thermodynamics , computer science , physics , optoelectronics , control (management) , chemistry , artificial intelligence , biology , agronomy
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