Open AccessC8.1 - Modelling and Control of a Pressure and Temperature Test Chamber for Pure Mems Pressure Sensors
Author(s) -
Jan Lotichius,
Eike Christmann,
Roland Werthschützky
Publication year - 2015
Publication title -
proceedings sensor 2015
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2015/c8.1
Subject(s) - temperature control , thermoelectric effect , temperature measurement , airflow , thermoelectric cooling , microelectromechanical systems , controller (irrigation) , control theory (sociology) , volume (thermodynamics) , mechanical engineering , pid controller , materials science , nuclear engineering , engineering , control engineering , computer science , thermodynamics , physics , control (management) , optoelectronics , agronomy , artificial intelligence , biology