Open AccessB6.1 - MEMS-based Micro-Coriolis Density and Flow Measurement Technology
Author(s) -
Christof Huber
Publication year - 2015
Publication title -
proceedings sensor 2015
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2015/b6.1
Subject(s) - microelectromechanical systems , flow sensor , flow (mathematics) , flow measurement , computer science , materials science , mechanics , acoustics , physics , optoelectronics