Open AccessB2.3 - From Basic Flow Property to MEMS Multiparameter Sensors
Author(s) -
Roman Beigelbeck,
Samir Ćerimović,
Almir Talić,
F. Köhl,
A. Jachimowicz,
Thilo Sauter,
Thomas Voglhuber–Brunnmaier,
Bernhard Jakoby,
Graeme John Urban
Publication year - 2015
Publication title -
proceedings sensor 2015
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2015/b2.3
Subject(s) - property (philosophy) , microelectromechanical systems , flow (mathematics) , flow sensor , computer science , materials science , mechanics , nanotechnology , acoustics , physics , philosophy , epistemology