Open AccessB2.1 - Demonstration of gas detection based on MEMS suspended cantilever and on-chip optical read-out
Author(s) -
Michal Zawierta,
Gino Putrino,
Mariusz Martyniuk,
K. K. M. B. Dilusha Silva,
Lorenzo Faraone,
Adrian Keating,
Robert I. Woodward,
John Dell,
Matthew Myers,
R. D. Jeffery
Publication year - 2015
Publication title -
proceedings sensor 2015
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2015/b2.1
Subject(s) - cantilever , microelectromechanical systems , chip , lab on a chip , materials science , optoelectronics , computer science , nanotechnology , microfluidics , telecommunications , composite material