Open AccessB2.1 - Demonstration of gas detection based on MEMS suspended cantilever and on-chip optical read-out
Author(s) -
Michal Zawierta,
Gino Putrino,
Mariusz Martyniuk,
Dilusha Silva,
L. Faraone,
Adrian Keating,
Robert I. Woodward,
J.M. Dell,
Matt Myers,
R. D. Jeffery
Publication year - 2015
Publication title -
proceedings sensor 2011
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2015/b2.1
Subject(s) - cantilever , microelectromechanical systems , chip , lab on a chip , materials science , optoelectronics , computer science , electronic engineering , nanotechnology , engineering , telecommunications , microfluidics , composite material
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