Open AccessA2.1 - Ceramic based pressure sensor with highly sensitive thin film
Author(s) -
Mario Cerino,
R. Britz,
Thomas Kuberczyk,
Matthäus Langosch,
Anne C. Probst,
Dennis Vollberg,
G. Schultes,
Dirk Göttel,
Alexander Landes
Publication year - 2015
Publication title -
proceedings sensor 2011
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2015/a2.1
Subject(s) - ceramic , pressure sensor , materials science , thin film , optoelectronics , pressure sensitive , composite material , nanotechnology , engineering , mechanical engineering , adhesive , layer (electronics)
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