Open AccessA2.1 - Ceramic based pressure sensor with highly sensitive thin film
Author(s) -
M. Cerino,
R. Britz,
Thomas Kuberczyk,
Matthäus Langosch,
Anne C. Probst,
Dennis Vollberg,
Günter Schultes,
Dirk Göttel,
Alexander Landes
Publication year - 2015
Publication title -
proceedings sensor 2015
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2015/a2.1
Subject(s) - materials science , ceramic , pressure sensor , thin film , pressure sensitive , composite material , optoelectronics , nanotechnology , mechanical engineering , engineering , adhesive , layer (electronics)