Open AccessP3.4 - Fabrication of Silicon Oxycarbide-Based Microcomponents via Photolithographic and Soft Lithography Approaches
Author(s) -
Emanuel Ionescu,
Sandra Martínez-Crespiera,
Malte Schlosser,
René Riedel,
Klaus Flittner,
Helmut F. Schlaak
Publication year - 2013
Publication title -
proceedings sensor 2011
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2013/p3.4
Subject(s) - photolithography , ceramic , materials science , soft lithography , lithography , fabrication , silicon , nanotechnology , optoelectronics , composite material , medicine , alternative medicine , pathology
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