Open AccessP3.4 - Fabrication of Silicon Oxycarbide-Based Microcomponents via Photolithographic and Soft Lithography Approaches
Author(s) -
Emanuel Ionescu,
Sandra Martínez-Crespiera,
Michael Schlosser,
R. Riedel,
Klaus Flittner,
Helmut F. Schlaak
Publication year - 2013
Publication title -
proceedings sensor 2013
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2013/p3.4
Subject(s) - fabrication , lithography , soft lithography , materials science , photolithography , silicon , nanotechnology , optoelectronics , medicine , alternative medicine , pathology