Open AccessB8.4 - Plasma Cleaning and Coating of Sensor Components
Author(s) -
C.N. Dietel
Publication year - 2013
Publication title -
proceedings sensor 2013
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2013/b8.4
Subject(s) - surface modification , plasma cleaning , materials science , coating , atmospheric pressure plasma , plasma polymerization , plasma , oxide , chemical engineering , environmentally friendly , adhesion , atmospheric pressure , nanotechnology , corrosion , epoxy , polymerization , plasma processing , process engineering , composite material , polymer , metallurgy , physics , quantum mechanics , ecology , oceanography , geology , engineering , biology