Open AccessB8.4 - Plasma Cleaning and Coating of Sensor Components
Author(s) -
C.N. Dietel
Publication year - 2013
Publication title -
proceedings sensor 2011
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2013/b8.4
Subject(s) - environmentally friendly , coating , plasma cleaning , plasma , dry cleaning , process engineering , surface modification , materials science , nanotechnology , computer science , waste management , chemical engineering , engineering , ecology , physics , quantum mechanics , biology
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