Open AccessA4.3 - The Infineon Silicon MEMS Microphone
Author(s) -
Alfons Dehé,
M. Wurzer,
Marc Füldner,
Ulrich Krumbein
Publication year - 2013
Publication title -
proceedings sensor 2011
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2013/a4.3
Subject(s) - microphone , microelectromechanical systems , sensitivity (control systems) , distortion (music) , noise (video) , electronic engineering , acoustics , signal (programming language) , materials science , silicon , computer science , electrical engineering , engineering , optoelectronics , amplifier , physics , cmos , artificial intelligence , loudspeaker , image (mathematics) , programming language
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