Open AccessA4.3 - The Infineon Silicon MEMS Microphone
Author(s) -
Alfons Dehé,
M. Wurzer,
M. Füldner,
Ulrich Krumbein
Publication year - 2013
Publication title -
proceedings sensor 2013
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor2013/a4.3
Subject(s) - microelectromechanical systems , computer science , microphone , silicon , materials science , optoelectronics , telecommunications , sound pressure