Open AccessP8.3 - Design, Fabrication and Characterization of a Novel 3D Force Sensor Made of SU-8
Author(s) -
A. S. Jordan,
A. Phataralaoha,
A. Tibrewala,
S. Büttgenbach
Publication year - 2011
Publication title -
proceedings sensor 2011
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor11/sp8.3
Subject(s) - fabrication , piezoresistive effect , photoresist , characterization (materials science) , diamond , materials science , microelectromechanical systems , silicon , nanotechnology , diamond like carbon , mechanical engineering , optoelectronics , engineering , composite material , medicine , alternative medicine , pathology , thin film , layer (electronics)
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