Open AccessB5.2 - Packaging Challenges for Monolithically Integrated Mircosensors
Author(s) -
M. Streiff
Publication year - 2011
Publication title -
proceedings sensor 2011
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/sensor11/b5.2
Subject(s) - differential pressure , focus (optics) , path (computing) , humidity , span (engineering) , product (mathematics) , computer science , electrical engineering , process engineering , automotive engineering , engineering , electronic engineering , civil engineering , computer network , physics , geometry , mathematics , mechanics , optics , thermodynamics
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