Open AccessB4.1 - Acceleration Sensor IP-Blocks for MEMS Foundry Surface Micromachining Process
Author(s) -
Roy Knechtel,
Sophia Dempwolf,
Siegfried Hering,
T. Link,
Martin Trächtler,
Jan Dehnert,
D. Hoffmann
Publication year - 2011
Publication title -
proceedings sensor 2011
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/sensor11/b4.1
Subject(s) - surface micromachining , acceleration , microelectromechanical systems , foundry , process (computing) , rapid prototyping , accelerometer , die (integrated circuit) , bulk micromachining , materials science , mechanical engineering , computer science , engineering , fabrication , nanotechnology , physics , medicine , alternative medicine , pathology , classical mechanics , operating system