Open AccessB1.4 - Ultra-Thin Resistors for Piezoresistive Sensors
Author(s) -
B. Schmidt,
M. Zier,
Peter Philipp,
J. Potfajova
Publication year - 2011
Publication title -
proceedings sensor 2011
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/sensor11/b1.4
Subject(s) - piezoresistive effect , fabrication , resistor , materials science , cantilever , deflection (physics) , ion implantation , optoelectronics , sheet resistance , doping , boron , ion beam , ion , nanotechnology , electrical engineering , composite material , voltage , optics , chemistry , engineering , medicine , alternative medicine , physics , organic chemistry , pathology , layer (electronics)
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom