Open AccessÜV1 - Novel Silicon and Polymer Sensors in Acoustics
Author(s) -
G. M. Sessler,
J. Hillenbrand
Publication year - 2009
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor09/v1/u1
Subject(s) - acoustics , surface micromachining , capacitive sensing , materials science , sensitivity (control systems) , transducer , capacitive micromachined ultrasonic transducers , vibration , noise (video) , silicon , distortion (music) , electronic engineering , harmonic , microelectromechanical systems , computer science , optoelectronics , electrical engineering , engineering , amplifier , fabrication , cmos , physics , medicine , alternative medicine , pathology , artificial intelligence , image (mathematics)
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