Open AccessB5.3 - Selectivity Improvement of High-Temperature Resonant Gas Sensors using Micromachined Membrane Arrays
Author(s) -
Denny Richter,
Jan Sauerwald,
Holger Fritze
Publication year - 2009
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor09/v1/b5.3
Subject(s) - selectivity , surface micromachining , materials science , membrane , optoelectronics , temperature measurement , chemistry , fabrication , physics , catalysis , medicine , biochemistry , alternative medicine , pathology , quantum mechanics
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