Open AccessB4.4 - New Packaging of Flow Sensors with Monolithic Integration of Micro-Channel on Chip
Author(s) -
S. Billat,
K. Kliche,
R. Gronmaier,
J. Auber,
Frank Hedirch,
M. Ashauer,
Roland Zengerle
Publication year - 2009
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor09/v1/b4.4
Subject(s) - chip , channel (broadcasting) , integrated circuit packaging , flow (mathematics) , flow sensor , system on a chip , chip scale package , computer science , materials science , electronic engineering , embedded system , engineering , telecommunications , acoustics , physics , geometry , mathematics