Open AccessB4.4 - New Packaging of Flow Sensors with Monolithic Integration of Micro-Channel on Chip
Author(s) -
S. Billat,
K. Kliche,
R. Gronmaier,
J. Auber,
Frank Hedirch,
M. Ashauer,
Roland Zengerle
Publication year - 2009
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/sensor09/v1/b4.4
Subject(s) - polydimethylsiloxane , flow sensor , chip , materials science , channel (broadcasting) , volumetric flow rate , flow (mathematics) , etching (microfabrication) , integrated circuit packaging , die (integrated circuit) , sensitivity (control systems) , microfluidics , electronic engineering , silicon , integrated circuit , optoelectronics , electrical engineering , nanotechnology , engineering , acoustics , physics , geometry , mathematics , layer (electronics) , quantum mechanics
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