Open AccessB3.1 - Novel Silicon High Pressure Sensing Element
Author(s) -
Patrik Heinickel,
Roland Werthschuetzky
Publication year - 2009
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/sensor09/v1/b3.1
Subject(s) - silicon , computer science , element (criminal law) , materials science , optoelectronics , law , political science