Open Access2.2 - Optical twist measurement by scatterometry
Author(s) -
Albrecht Hertzsch,
Knut Kröger,
Marko Großmann
Publication year - 2013
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/opto2013/o2.2
Subject(s) - waviness , twist , stylus , diffraction , optics , surface roughness , scattering , thread (computing) , surface finish , materials science , machining , light scattering , speckle pattern , mechanical engineering , physics , geometry , acoustics , composite material , engineering , mathematics , metallurgy