1.4 - Quasi-static Microscanner with Linearized Scanning for an adaptive 3D-Lasercamera | Zendy

T. Sandner | Zendy; Th. Grasshoff | Zendy; Markus Schwarzenberg | Zendy; Harald Schenk | Zendy

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1.4 - Quasi-static Microscanner with Linearized Scanning for an adaptive 3D-Lasercamera

Author(s) -

T. Sandner,

Th. Grasshoff,

Markus Schwarzenberg,

Harald Schenk

Publication year - 2013

Language(s) - English

Resource type - Conference proceedings

DOI - 10.5162/opto2013/o1.4

Subject(s) - computer science

This paper presents a gimbaled MEMS scanning mirror (MSM) especially developed for adaptive raster scanning in a novel 3D ToF laser camera. Large quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6x3.6mm elliptical mirror at 1600Hz and 80° optical scan range. For position feedback piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effective 5mm a synchronized driven MEMS scanner array - consisting of five hybrid assembled MEMS devices - are used in a novel 3D ToF laser scanner enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 3…5mm at 7.5m measuring range for a gray target

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