
3.3 - New Microsystems-Based IR Gas Sensing Technology
Author(s) -
Per Øhlckers,
A. V. Kropachev,
J. Kunsch
Publication year - 2011
Language(s) - Lithuanian
Resource type - Conference proceedings
DOI - 10.5162/irs11/i3.3
Subject(s) - microsystem , computer science , materials science , nanotechnology