P1MM.6 - Fabrication Concept for Biomimetic Microfluidic Systems
Author(s) -
Johann Zehetner,
Stephan Kasemann,
Elisabeth Kostal,
György Vankó,
Oleg Babchenko
Publication year - 2018
Publication title -
proceedings imcs 2012
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/imcs2018/p1mm.6
Subject(s) - materials science , microfluidics , reactive ion etching , nanotechnology , laser ablation , fabrication , microelectromechanical systems , etching (microfabrication) , silicon , optoelectronics , laser , layer (electronics) , optics , medicine , alternative medicine , pathology , physics
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