Open AccessP2.0.5 Studies of Hydrogen Gas Sensing Properties of Anatase TiO2 Thin Films Prepared by Magnetron Sputtering
Author(s) -
Azhar Ali Haidry,
Pavol Ďurina,
Martin Truchlý,
L. Satrapinský,
T. Pleceník,
Marián Mikula,
Branislav Grančič,
Т. Роч,
M. Gregor,
P. Kúš,
A. Plecenı́k,
M. Tomášek
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/p2.0.5
Subject(s) - anatase , thin film , materials science , sputter deposition , sapphire , sputtering , hydrogen , titanium dioxide , titanium , cavity magnetron , optoelectronics , analytical chemistry (journal) , electrode , chemical engineering , nanotechnology , optics , composite material , metallurgy , chemistry , catalysis , photocatalysis , laser , biochemistry , physics , organic chemistry , chromatography , engineering