Open AccessP2.0.14 Deposition of nanocrystalline WO3 thin film using magnetron sputtered multilayer structure in view of gas sensor applications
Author(s) -
T. Pisarkiewicz,
Wojciech Maziarz,
Artur Rydosz,
Henryk Jankowski,
J. Sokulski
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/p2.0.14
Subject(s) - nanocrystalline material , materials science , cavity magnetron , sputter deposition , deposition (geology) , thin film , optoelectronics , nanotechnology , sputtering , paleontology , sediment , biology