Open AccessP2.0.14 Deposition of nanocrystalline WO3 thin film using magnetron sputtered multilayer structure in view of gas sensor applications
Author(s) -
T. Pisarkiewicz,
Wojciech Maziarz,
Artur Rydosz,
Henryk Jankowski,
J. Sokulski
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/p2.0.14
Subject(s) - nanocrystalline material , materials science , annealing (glass) , tungsten trioxide , sputter deposition , tungsten , thin film , layer (electronics) , sputtering , cavity magnetron , deposition (geology) , oxide , metal , chemical engineering , analytical chemistry (journal) , metallurgy , composite material , nanotechnology , chemistry , paleontology , sediment , biology , chromatography , engineering
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