Open AccessP1.4.8 Nanostructured Materials Application in Construction of Microhumidity Sensors
Author(s) -
Maxim Chuprin,
O.M. Ivanova,
S. A. Krutovertsev,
Anatoly V. Shevchenko,
A. Tarasova
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/p1.4.8
Subject(s) - humidity , microelectronics , materials science , dew point , adsorption , moisture , chemical engineering , water content , doping , process engineering , nanotechnology , composite material , optoelectronics , chemistry , organic chemistry , meteorology , physics , geotechnical engineering , engineering