Open AccessP1.1.17 Integration of carbon nanotubes to three-dimensional C-MEMS for glucose sensors
Author(s) -
Shuang Xi,
Tielin Shi,
Lei Zhang,
Dan Liú,
Hu Long,
Shiyuan Liu,
ZiRong Tang
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/p1.1.17
Subject(s) - glucose oxidase , carbon nanotube , materials science , microelectromechanical systems , photoresist , polypyrrole , photolithography , electrode , fabrication , nanotechnology , biosensor , carbon fibers , polymer , polymerization , composite material , chemistry , composite number , medicine , alternative medicine , layer (electronics) , pathology