Open Access7.3.4 Thin-Film Gas Sensors Operating in a Perpendicular Current Mode
Author(s) -
Yurie Ishikawa,
Kazuhiro Hara
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/7.3.4
Subject(s) - electrode , materials science , perpendicular , thin film , optoelectronics , annealing (glass) , substrate (aquarium) , deposition (geology) , current (fluid) , composite material , electrical engineering , nanotechnology , chemistry , geometry , mathematics , engineering , paleontology , oceanography , sediment , geology , biology
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