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4.2.5 A MEMS Based FabryPerot Protein Sensor with Reference Sensor
Author(s) -
Hiroki Oyama,
Kazuhiro Takahashi,
Nobuo Misawa,
Kōichi Okumura,
Mákoto Ishida,
Kazuaki Sawada
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/4.2.5
Subject(s) - materials science , transmittance , optoelectronics , photocurrent , microelectromechanical systems , photodiode , piezoresistive effect , biosensor , optics , nanotechnology , physics

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