Open Access4.2.5 A MEMS Based FabryPerot Protein Sensor with Reference Sensor
Author(s) -
Hiroki Oyama,
Kazuhiro Takahashi,
Nobuo Misawa,
Kōichi Okumura,
M. Ishida,
Kazuaki Sawada
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - English
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/4.2.5
Subject(s) - microelectromechanical systems , computer science , electro optical sensor , materials science , electronic engineering , optoelectronics , engineering