Open Access2.3.5 Large-Scale Integration of Nanomechanical Sensors
Author(s) -
Stéphane Evoy
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/2.3.5
Subject(s) - scale (ratio) , computer science , nanotechnology , materials science , physics , quantum mechanics