Open Access2.3.5 Large-Scale Integration of Nanomechanical Sensors
Author(s) -
Stéphane Evoy
Publication year - 2012
Publication title -
proceedings imcs 2012
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.5162/imcs2012/2.3.5
Subject(s) - resonator , transducer , nanotechnology , computer science , scale (ratio) , materials science , optoelectronics , physics , acoustics , quantum mechanics
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