Open AccessRESIDUAL VIBRATIONS OF ELECTROSTATIC MICRO-ACTUATORS WITH NOVEL SHAPED CANTILEVERS
Author(s) -
Ming-Hung Hsu
Publication year - 2009
Publication title -
journal of marine science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.229
H-Index - 27
eISSN - 2709-6998
pISSN - 1023-2796
DOI - 10.51400/2709-6998.1962
Subject(s) - cantilever , nonlinear system , actuator , voltage , vibration , materials science , electrode , mechanics , microelectromechanical systems , residual , differential (mechanical device) , control theory (sociology) , acoustics , physics , computer science , nanotechnology , engineering , algorithm , electrical engineering , composite material , control (management) , quantum mechanics , artificial intelligence , thermodynamics