Open AccessThe analysis of the errors of the dynamic interferometry method
in the control of local surface inhomogeneities of the nanometer level of the profiles of optical parts
Author(s) -
D. V. Denisov,
Mariya Ustyugova,
Valeriya Frolova,
Denis Mashoshin,
Ismail Gafarov
Publication year - 2022
Publication title -
uspehi prikladnoj fiziki
Language(s) - English
Resource type - Journals
ISSN - 2307-4469
DOI - 10.51368/2307-4469-2022-10-1-71-89
Subject(s) - interferometry , nanometre , optics , surface (topology) , materials science , physics , mathematics , geometry