Open AccessThe analysis of the influence of limiting factors in the method
of differential scattering in the control of surface nhomogeneities
of the subnanometer level of the profiles of optical parts
Author(s) -
D. V. Denisov
Publication year - 2022
Publication title -
prikladnaâ fizika
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.205
H-Index - 7
ISSN - 1996-0948
DOI - 10.51368/1996-0948-2022-1-89-96
Subject(s) - limiting , scattering , surface (topology) , differential (mechanical device) , control (management) , optics , materials science , physics , computer science , mathematics , engineering , thermodynamics , mechanical engineering , artificial intelligence , geometry