Open AccessPhysical processes in a low-power inductive plasma source in the presence of a weak magnetic field
Author(s) -
Phedor Ivandikov,
И. И. Задириев,
E.A. Kralkina
Publication year - 2021
Publication title -
prikladnaâ fizika
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.205
H-Index - 7
ISSN - 1996-0948
DOI - 10.51368/1996-0948-2021-5-38-43
Subject(s) - magnetic field , plasma , coupling (piping) , inductive coupling , physics , power (physics) , field (mathematics) , atomic physics , nuclear magnetic resonance , materials science , nuclear physics , mathematics , quantum mechanics , pure mathematics , metallurgy
Research into the influence of a weak external magnetic field (<150 G) on the efficiency of power coupling to plasma and on the structure of axial RF fields in plasma is presented. Power
coupling to the discharge plasma as well as the structure of the axial component of RF magnetic fields are shown to depend on the external magnetic field’s magnitude in a nonmonotous manner.