Open AccessSynthesis of Novel Platinum Precursor and Its Application to Metal Organic Chemical Vapor Deposition of Platinum Thin Films
Publication year - 2008
Publication title -
bulletin of the korean chemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.237
H-Index - 59
eISSN - 1229-5949
pISSN - 0253-2964
DOI - 10.5012/bkcs.2008.29.8.1491
Subject(s) - platinum , chemical vapor deposition , x ray photoelectron spectroscopy , thin film , analytical chemistry (journal) , electrical resistivity and conductivity , metal , metalorganic vapour phase epitaxy , chemistry , carbon film , deposition (geology) , single crystal , nitrogen , materials science , inorganic chemistry , crystallography , nanotechnology , chemical engineering , catalysis , organic chemistry , epitaxy , paleontology , electrical engineering , layer (electronics) , sediment , engineering , biology