Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge | Zendy

S. Binwal | Zendy; J. K. Joshi | Zendy; S. K. Karkari | Zendy; Predhiman Kaw | Zendy; Lekha Nair | Zendy; H. Leggate | Zendy; A. Somers | Zendy; M. M. Turner | Zendy

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Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge

Author(s) -

S. Binwal,

J. K. Joshi,

S. K. Karkari,

Predhiman Kaw,

Lekha Nair,

H. Leggate,

A. Somers,

M. M. Turner

Publication year - 2018

Publication title -

walailak journal of science and technology (wjst)

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.146

H-Index - 15

eISSN - 2228-835X

pISSN - 1686-3933

DOI - 10.48048/wjst.2019.4784

Subject(s) - electron temperature , plasma , magnetic field , electron , capacitive sensing , electrode , transverse plane , atomic physics , temperature measurement , materials science , chemistry , physics , electrical engineering , thermodynamics , structural engineering , quantum mechanics , engineering

A floating emissive probe has been used to obtain the spatial electron temperature (Te) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform Te. Upon application of the magnetic field, the Te profile becomes non-uniform and skewed. With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case.

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