Open AccessSpatial Temperature Profile in a Magnetised Capacitively Coupled Discharge
Author(s) -
S. Binwal,
J. K. Joshi,
S. K. Karkari,
P. K. Kaw,
Lekha Nair,
H. Leggate,
A. Somers,
Miles Turner
Publication year - 2018
Publication title -
walailak journal of science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.146
H-Index - 15
eISSN - 2228-835X
pISSN - 1686-3933
DOI - 10.48048/wjst.2019.4784
Subject(s) - electron temperature , plasma , magnetic field , electron , capacitive sensing , electrode , transverse plane , atomic physics , temperature measurement , materials science , chemistry , physics , electrical engineering , thermodynamics , structural engineering , quantum mechanics , engineering
A floating emissive probe has been used to obtain the spatial electron temperature (Te) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform Te. Upon application of the magnetic field, the Te profile becomes non-uniform and skewed. With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case.