Open AccessDesign And Analysis of Rotation Rate Sensor - Modeling of vibratory MEMs Gyroscope
Author(s) -
Priya.P. Shreshtha,
Sushas S. Mohite
Publication year - 2013
Publication title -
international journal of applied research in mechanical engineering
Language(s) - English
Resource type - Journals
ISSN - 2231-5950
DOI - 10.47893/ijarme.2013.1085
Subject(s) - gyroscope , microelectromechanical systems , vibrating structure gyroscope , bandwidth (computing) , rotation (mathematics) , electronic engineering , computer science , physics , engineering , aerospace engineering , telecommunications , optoelectronics , artificial intelligence
The present work provides a detailed account of design and analysis for a typical comb-driven capacitively sensed microgyroscope. The general approach pursured in this paper is to show the possibility of achieving wide-bandwidth frequency responses in drive mode of vibratory gyroscope. Towards this goal one major design concept were discussed.