Open AccessObtaining Thin Films of Silicon-Carbon Method of Reactive Magnetron Sputtering are used as Solar Cells
Author(s) -
B. A. Najafov,
Abasov Fp,
R.M. Ibragimov,
Baku c Industry
Publication year - 2021
Language(s) - English
DOI - 10.47363/jnsrr/2021(3)121
Subject(s) - materials science , silicon , boron , sputter deposition , carbon fibers , transmission electron microscopy , amorphous solid , solar cell , amorphous silicon , thin film , analytical chemistry (journal) , sputtering , carbon film , chemical engineering , crystalline silicon , optoelectronics , nanotechnology , composite material , crystallography , chemistry , composite number , organic chemistry , chromatography , engineering
In the work of the various parameters studied film amorphous and nano-crystalline alloy silicon-carbon (а-nc-Si1-xCx :H (x=0÷1)) doped with phosphorus (PH3 ) and boron (B2 H6 ). Studied the properties of these films on different substrates derived from quartz, glass and Silicon-coated Fe, Al, Pd, Ni, Ti, Ag. Using transmission electron microscopy (TEM) studied the morphology obtained nano tubes. Also examine the structural properties of films by using infrared spectroscopy and x-ray diffraction of x-rays. Created by cascade solar cells area S = 1.2 cm2 and have a coefficient of 11.2%.