Open AccessVECTOR PROTON BEAM WRITING SYSTEM
Author(s) -
H.E. Polozhii,
A.G. Ponomarev,
S.V. Kolinko,
В.А. Ребров
Publication year - 2022
Publication title -
problems of atomic science and technology
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.216
H-Index - 17
eISSN - 1562-6016
pISSN - 1682-9344
DOI - 10.46813/2022-139-052
Subject(s) - raster scan , beam (structure) , raster graphics , optics , upgrade , materials science , proton , fabrication , computer science , physics , computer graphics (images) , nuclear physics , medicine , alternative medicine , pathology , operating system