Open AccessGROWTH RATE OF DIAMOND-LIKE COATINGS SYNTHESIZED IN RF DISCHARGE AT VARIOUS RATIOS OF THE CONCENTRATIONS OF Ar AND C6H6
Author(s) -
A. I. Kalinichenko,
A.О. Omarov,
V.E. Strel’nitskij
Publication year - 2021
Publication title -
problems of atomic science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.216
H-Index - 17
eISSN - 1562-6016
pISSN - 1682-9344
DOI - 10.46813/2021-132-109
Subject(s) - partial pressure , materials science , chemical vapor deposition , argon , deposition (geology) , plasma , diamond , coating , flux (metallurgy) , analytical chemistry (journal) , growth rate , ion , nanotechnology , composite material , atomic physics , metallurgy , chemistry , oxygen , environmental chemistry , paleontology , physics , geometry , mathematics , organic chemistry , quantum mechanics , sediment , biology
Diamond-like coatings (DLC) synthesized by plasma-chemical deposition from a vapor mixture of C6H6 and Ar have been investigated. The growth rate of the coating was measured, which showed a nonlinear dependence on the partial pressure of Ar. The mathematical model of the deposition has been developed, which qualitatively and quantitatively describes the dependence of the ion flux density and deposition rate on the partial pressure of argon.