Open AccessINFLUENCE OF THE MAGNITUDE OF THE BIAS POTENTIAL AND THICKNESS OF THE LAYERS ON THE STRUCTURE, SUBSTRUCTURE, STRESS-DEFORMED STATE AND MECHANICAL CHARACTERISTICS OF VACUUM-ARC MULTI-LAYERED (TiMo)N/(TiSi)N COATINGS
Author(s) -
O. V. Sоbоl,
Hanna Postelnyk,
A. A. Meylekhov,
Valeria Subbotinа,
V. А. Stolbovoy,
A. V. Dolomanov,
Д. А. Колесников,
М. Г. Ковалева,
Yu.V. Sukhorukova
Publication year - 2020
Publication title -
problems of atomic science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.216
H-Index - 17
eISSN - 1562-6016
pISSN - 1682-9344
DOI - 10.46813/2020-128-068
Subject(s) - materials science , composite material , composite number , vacuum arc , substructure , electrical engineering , structural engineering , engineering , cathode
Layers based on titanium nitride doped with molybdenum and silicon were used to create a multilayer composite. In this case, the mismatch between the lattice periods of (TiMo)N and (TiSi)N layers was about 1%. It was found that in the (TiMo)N/(TiSi)N multilayer composite, such a mismatch of the periods in the constituent layers does not change the single-phase state of the composite even at relatively large layer thicknesses (about 350 nm). The creation of a (TiMo)N/(TiSi)N composite with a nanometer layer thickness allows one to reduce the magnitude of macrostresses (a large value of which is characteristic of single-layer (TiMo)N coatings) and change the substructural characteristics in a wide range of values. It has been established that the use of multi-element (TiMo)N and (TiSi)N layers in a multilayer coating design allows one to achieve a high-hard state with high adhesive strength and good tribological characteristics. The highest properties (hardness – 34.8 GPa and adhesive strength - 166.09 N) were achieved in coatings obtained at Ub = -200 V and a layer thickness of 80 nm, which are characterized by compression macrostresses of 7.85 GPa and microstrains - 0.75%.