Open AccessSTRUCTURAL ENGINEERING OF NbN/Cu MULTILAYER COATINGS BY CHANGING THE THICKNESS OF THE LAYERS AND THE MAGNITUDE OF THE BIAS POTENTIAL DURING DEPOSITION
Author(s) -
O. V. Sоbоl,
А. А. Андреев,
V. А. Stolbovoy,
Д. А. Колесников,
М. Г. Ковалева,
A. A. Meylekhov,
Н.О. Postelnyk,
A. V. Dolomanov,
Yu. Ye. Sagaidashnikov,
Zh. V. Kraievska
Publication year - 2019
Language(s) - English
DOI - 10.46813/2019-123-147
Subject(s) - materials science , crystallite , niobium nitride , nitride , niobium , metastability , texture (cosmology) , lattice constant , composite material , layer (electronics) , metallurgy , diffraction , optics , chemistry , physics , image (mathematics) , organic chemistry , artificial intelligence , computer science
To determine the patterns of structural engineering of vacuum-arc coatings based on niobium nitride in the NbN/Cu multilayer composition, the effect of layer thickness and bias potential on the structural-phase state and physico-mechanical characteristics of vacuum-arc coatings was studied. It was found that the metastable δ-NbN phase (cubic crystal lattice, structural type NaCl) is formed in thin layers (about 8 nm thick) regardless of Ub. With a greater thickness of the layers of niobium nitride (in the multilayer NbN/Cu composition), the phase composition changes from metastable δ-NbN to the equilibrium ε-NbN phase with a hexagonal crystal lattice. An increase in the bias potential during deposition from -50 to -200 V mainly affects the change in the preferential orientation of crystallite growth. The highest hardness (28.2 GРa) and adhesive resistance is achieved in coatings obtained at Ub = -200 V with the smallest layer thickness. The highest hardness corresponds to the structurally deformed state in which the crystallite texture is formed with the [100] axis perpendicular to the growth surface, as well as a large microstrain (1.5%) in crystallites.