Open AccessX-ray grayscale lithography for sub-micron lines with cross sectional hemisphere for Bio-MEMS application
Author(s) -
Kanghyun Kim,
Jong Hyun Kim,
Hyoryung Nam,
Suhyeon Kim,
Geunbae Lim
Publication year - 2021
Publication title -
journal of sensor science and technology
Language(s) - English
Resource type - Journals
eISSN - 2093-7563
pISSN - 1225-5475
DOI - 10.46670/jsst.2021.30.3.170
Subject(s) - microelectromechanical systems , grayscale , lithography , materials science , optoelectronics , optics , physics , pixel
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