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A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications
Author(s) -
Bhaskaran Prathish Raaja,
R. Joseph Daniel,
K. Sumangala
Publication year - 2017
Publication title -
transactions on electrical and electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.201
H-Index - 18
eISSN - 2092-7592
pISSN - 1229-7607
DOI - 10.4313/teem.2017.18.2.78
Subject(s) - accelerometer , piezoelectric accelerometer , cantilever , microelectromechanical systems , sensitivity (control systems) , deflection (physics) , materials science , piezoelectricity , piezoresistive effect , voltage , acoustics , electronic engineering , piezoelectric sensor , electrical engineering , computer science , optoelectronics , engineering , physics , optics , composite material , operating system

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