Open AccessImplementation of High Carrier Mobility in Al-N Codoped p-Type ZnO Thin Films Fabricated by Direct Current Magnetron Sputtering with ZnO:Al2O3Ceramic Target
Author(s) -
Jin Han,
Bing Xu,
Choon-Bae Park
Publication year - 2011
Publication title -
transactions on electrical and electronic materials/transactions on electrical and electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.201
H-Index - 18
eISSN - 2092-7592
pISSN - 1229-7607
DOI - 10.4313/teem.2011.12.4.169
Subject(s) - materials science , wurtzite crystal structure , sputter deposition , analytical chemistry (journal) , sputtering , thin film , electrical resistivity and conductivity , diffraction , ceramic , zinc , optoelectronics , nanotechnology , composite material , optics , metallurgy , chemistry , physics , engineering , chromatography , electrical engineering