Open AccessThe Fabrication by using Surface MEMS of 3C-SiC Micro-heaters and RTD Sensors and their Resultant Properties
Author(s) -
Sang-Soo Noh,
Jong Mo Seo,
Eung-Ahn Lee
Publication year - 2009
Publication title -
transactions on electrical and electronic materials/transactions on electrical and electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.201
H-Index - 18
eISSN - 2092-7592
pISSN - 1229-7607
DOI - 10.4313/teem.2009.10.4.131
Subject(s) - materials science , torr , fabrication , analytical chemistry (journal) , electrical resistivity and conductivity , silicon carbide , microelectromechanical systems , chemical vapor deposition , microstructure , dopant , composite material , doping , nanotechnology , optoelectronics , electrical engineering , medicine , alternative medicine , pathology , chemistry , physics , chromatography , thermodynamics , engineering