Open AccessA Study on the Dip-pen Nanolithography Process and Fabrication of Optical Waveguide for the Application of Biosensor
Author(s) -
Junhyong Kim,
Hoe-Young Yang,
Chong-Hee Yu,
Hyun-Yong Lee
Publication year - 2008
Publication title -
transactions on electrical and electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.201
H-Index - 18
eISSN - 2092-7592
pISSN - 1229-7607
DOI - 10.4313/teem.2008.9.4.163
Subject(s) - materials science , biosensor , dip pen nanolithography , interferometry , fabrication , waveguide , lithography , nanolithography , optoelectronics , refractive index , photonic crystal , sensitivity (control systems) , mach–zehnder interferometer , optics , nanotechnology , electronic engineering , medicine , alternative medicine , physics , engineering , pathology
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