Open AccessThe Study for Transient Enhanced Diffusion of Indium and Its Application to μm Logic Devices
Author(s) -
Jun-Ha Lee,
Hoong-Joo Lee
Publication year - 2004
Publication title -
transactions on electrical and electronic materials/transactions on electrical and electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.201
H-Index - 18
eISSN - 2092-7592
pISSN - 1229-7607
DOI - 10.4313/teem.2004.5.6.211
Subject(s) - indium , materials science , diffusion , impurity , calibration , thermal diffusivity , silicon , boron , analytical chemistry (journal) , transient (computer programming) , optoelectronics , thermodynamics , physics , computer science , chemistry , chromatography , operating system , quantum mechanics , nuclear physics