Open AccessAl2O3Nano-Coating by Atomic Layer Deposition
Author(s) -
Byungdon Min,
JongSoo Lee,
Sang-Sig Kim
Publication year - 2003
Publication title -
transactions on electrical and electronic materials
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.201
H-Index - 18
eISSN - 2092-7592
pISSN - 1229-7607
DOI - 10.4313/teem.2003.4.3.015
Subject(s) - nanorod , materials science , atomic layer deposition , high resolution transmission electron microscopy , transmission electron microscopy , amorphous solid , layer (electronics) , substrate (aquarium) , coating , nanotechnology , chemical engineering , crystallography , chemistry , engineering , oceanography , geology
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