Open AccessEffect of Dry Process on Dielectric Properties of PZT Thin Films Prepared by Sol-Gel Process
Author(s) -
Min-Ho Bae,
Kee-Joe Lim,
Hyun-Hoo Kim,
Kwangsoo No
Publication year - 2002
Publication title -
transactions on electrical and electronic materials/transactions on electrical and electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.201
H-Index - 18
eISSN - 2092-7592
pISSN - 1229-7607
DOI - 10.4313/teem.2002.3.1.042
Subject(s) - materials science , annealing (glass) , dielectric , ferroelectricity , dissipation factor , lead zirconate titanate , composite material , thin film , coercivity , dielectric loss , optoelectronics , nanotechnology , condensed matter physics , physics