Open AccessMetal-Semiconductor-Metal Photodetector Fabricated on Thin Polysilicon Film
Author(s) -
Jaesung Lee,
Kyeong-Keun Choi
Publication year - 2017
Publication title -
journal of the korean institute of electrical and electronic material engineers
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2017.30.5.276
Subject(s) - materials science , photodetector , metal , optoelectronics , polysilicon depletion effect , semiconductor , thin film , composite material , metallurgy , electrical engineering , nanotechnology , transistor , engineering , voltage , gate oxide
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