Open AccessMetal-Semiconductor-Metal Photodetector Fabricated on Thin Polysilicon Film
Author(s) -
JaeSung Lee,
Kwang Hyun Choi
Publication year - 2017
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2017.30.5.276
Subject(s) - materials science , photodetector , metal , optoelectronics , polysilicon depletion effect , semiconductor , thin film , composite material , metallurgy , electrical engineering , nanotechnology , transistor , engineering , voltage , gate oxide