Open AccessEffect of GaGe Sputtering Power on Ga Doping in Phase Change Memory Materials
Author(s) -
Soon-Won Jung,
Seung-Yun Lee
Publication year - 2015
Publication title -
jeon'gi jeonja jaeryo haghoe nonmunji/jeon-gi jeonja jaeryo hakoe nonmunji
Language(s) - English
Resource type - Journals
eISSN - 2288-3258
pISSN - 1226-7945
DOI - 10.4313/jkem.2015.28.5.285
Subject(s) - sputtering , materials science , amorphous solid , phase change memory , evaporation , doping , crystallization , phase change material , phase (matter) , thin film , surface roughness , composite material , melting point , analytical chemistry (journal) , metallurgy , optoelectronics , thermal , thermodynamics , nanotechnology , chemistry , crystallography , physics , organic chemistry , layer (electronics) , chromatography